Nanoparticle Engineering for Chemical-Mechanical Planarization
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
- Autores:
- Tipo de recurso:
- Book
- Fecha de publicación:
- 2009
- Institución:
- Universidad de Bogotá Jorge Tadeo Lozano
- Repositorio:
- Expeditio: repositorio UTadeo
- Idioma:
- eng
- OAI Identifier:
- oai:expeditiorepositorio.utadeo.edu.co:20.500.12010/14637
- Acceso en línea:
- https://library.oapen.org/handle/20.500.12657/25193
http://hdl.handle.net/20.500.12010/14637
- Palabra clave:
- Agricultura
Ingeniería de nanopartículas
Ciencias materiales
Planarización químico-mecánica
- Rights
- License
- Abierto (Texto Completo)
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| dc.title.spa.fl_str_mv |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| title |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| spellingShingle |
Nanoparticle Engineering for Chemical-Mechanical Planarization Agricultura Ingeniería de nanopartículas Ciencias materiales Planarización químico-mecánica |
| title_short |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| title_full |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| title_fullStr |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| title_full_unstemmed |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| title_sort |
Nanoparticle Engineering for Chemical-Mechanical Planarization |
| dc.subject.spa.fl_str_mv |
Agricultura |
| topic |
Agricultura Ingeniería de nanopartículas Ciencias materiales Planarización químico-mecánica |
| dc.subject.lemb.none.fl_str_mv |
Ingeniería de nanopartículas Ciencias materiales Planarización químico-mecánica |
| description |
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance. |
| publishDate |
2009 |
| dc.date.created.none.fl_str_mv |
2009 |
| dc.date.accessioned.none.fl_str_mv |
2020-10-21T15:12:28Z |
| dc.date.available.none.fl_str_mv |
2020-10-21T15:12:28Z |
| dc.type.local.spa.fl_str_mv |
Libro |
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http://purl.org/coar/resource_type/c_2f33 |
| format |
http://purl.org/coar/resource_type/c_2f33 |
| dc.identifier.isbn.none.fl_str_mv |
978-1-420-05911-3 |
| dc.identifier.other.none.fl_str_mv |
https://library.oapen.org/handle/20.500.12657/25193 |
| dc.identifier.uri.none.fl_str_mv |
http://hdl.handle.net/20.500.12010/14637 |
| dc.identifier.doi.none.fl_str_mv |
10.1201/9781420059137 |
| identifier_str_mv |
978-1-420-05911-3 10.1201/9781420059137 |
| url |
https://library.oapen.org/handle/20.500.12657/25193 http://hdl.handle.net/20.500.12010/14637 |
| dc.language.iso.spa.fl_str_mv |
eng |
| language |
eng |
| dc.rights.coar.fl_str_mv |
http://purl.org/coar/access_right/c_abf2 |
| dc.rights.local.spa.fl_str_mv |
Abierto (Texto Completo) |
| dc.rights.creativecommons.none.fl_str_mv |
https://creativecommons.org/licenses/by-nc-nd/4.0/legalcode |
| rights_invalid_str_mv |
Abierto (Texto Completo) https://creativecommons.org/licenses/by-nc-nd/4.0/legalcode http://purl.org/coar/access_right/c_abf2 |
| dc.format.extent.spa.fl_str_mv |
222 páginas |
| dc.format.mimetype.spa.fl_str_mv |
application/pdf |
| dc.publisher.spa.fl_str_mv |
Taylor & Francis Knowledge Unlatched - 102698 |
| institution |
Universidad de Bogotá Jorge Tadeo Lozano |
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Repositorio Institucional - Universidad Jorge Tadeo Lozano |
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expeditio@utadeo.edu.co |
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2020-10-21T15:12:28Z2020-10-21T15:12:28Z2009978-1-420-05911-3https://library.oapen.org/handle/20.500.12657/25193http://hdl.handle.net/20.500.12010/1463710.1201/9781420059137222 páginasapplication/pdfengTaylor & FrancisKnowledge Unlatched - 102698AgriculturaIngeniería de nanopartículasCiencias materialesPlanarización químico-mecánicaNanoparticle Engineering for Chemical-Mechanical PlanarizationLibrohttp://purl.org/coar/resource_type/c_2f33Abierto (Texto Completo)https://creativecommons.org/licenses/by-nc-nd/4.0/legalcodehttp://purl.org/coar/access_right/c_abf2Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. This comprehensive text also presents design techniques using polymeric additives to improve CMP performance.Ungyu, PaikPark, Jea GunLICENSElicense.txtlicense.txttext/plain; charset=utf-82938https://expeditiorepositorio.utadeo.edu.co/bitstream/20.500.12010/14637/2/license.txtabceeb1c943c50d3343516f9dbfc110fMD52open accessORIGINALNanoparticle_13.pdfNanoparticle_13.pdfVer documentoapplication/pdf20957460https://expeditiorepositorio.utadeo.edu.co/bitstream/20.500.12010/14637/1/Nanoparticle_13.pdf4babcac33f7e5904dd3e1a61a3e42370MD51open accessTHUMBNAILNanoparticle_13.pdf.jpgNanoparticle_13.pdf.jpgIM Thumbnailimage/jpeg26826https://expeditiorepositorio.utadeo.edu.co/bitstream/20.500.12010/14637/3/Nanoparticle_13.pdf.jpg9d43882f1245ee103c98fe2390310685MD53open access20.500.12010/14637oai:expeditiorepositorio.utadeo.edu.co:20.500.12010/146372021-01-14 17:02:16.199open accessRepositorio Institucional - Universidad Jorge Tadeo Lozanoexpeditio@utadeo.edu.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 |