A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic

A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between...

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Autores:
Arias-Hernández, Néstor Alonso
Molina Prado, Martha Lucía
Meneses Fonseca, Jaime Enrique
Tipo de recurso:
Article of journal
Fecha de publicación:
2015
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/60731
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/60731
http://bdigital.unal.edu.co/59063/
Palabra clave:
62 Ingeniería y operaciones afines / Engineering
profilometry
optical metrology
surface topography
Mirau interferometer.
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional
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spelling Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Arias-Hernández, Néstor Alonso22f60d68-bee4-4550-9e6f-35e4ed9510e3300Molina Prado, Martha Lucía0e483b82-5c90-41fe-aa52-f0c3f026c53c300Meneses Fonseca, Jaime Enrique18fafce9-ebe9-4daa-a076-ba51d1cfe77a3002019-07-02T18:59:06Z2019-07-02T18:59:06Z2015-03-01ISSN: 2346-2183https://repositorio.unal.edu.co/handle/unal/60731http://bdigital.unal.edu.co/59063/A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between Mirau objective and object surface. Topographic reconstructions of objects with dimensions of some tenths of millimeters were calculated with an accuracy of approximately 28 nanometers. Theoretical analysis and experimental results are shown.application/pdfspaUniversidad Nacional de Colombia (Sede Medellín). Facultad de Minas.https://revistas.unal.edu.co/index.php/dyna/article/view/42616Universidad Nacional de Colombia Revistas electrónicas UN DynaDynaArias-Hernández, Néstor Alonso and Molina Prado, Martha Lucía and Meneses Fonseca, Jaime Enrique (2015) A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic. DYNA, 82 (190). pp. 153-159. ISSN 2346-218362 Ingeniería y operaciones afines / Engineeringprofilometryoptical metrologysurface topographyMirau interferometer.A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodicArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTORIGINAL42616-245784-1-PB.pdfapplication/pdf1708225https://repositorio.unal.edu.co/bitstream/unal/60731/1/42616-245784-1-PB.pdf3d711891a3e7042331fef497fdb24739MD51THUMBNAIL42616-245784-1-PB.pdf.jpg42616-245784-1-PB.pdf.jpgGenerated Thumbnailimage/jpeg9710https://repositorio.unal.edu.co/bitstream/unal/60731/2/42616-245784-1-PB.pdf.jpg7b2d018fd642d451f421412b3a1205a5MD52unal/60731oai:repositorio.unal.edu.co:unal/607312024-04-14 23:11:47.165Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co
dc.title.spa.fl_str_mv A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
title A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
spellingShingle A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
62 Ingeniería y operaciones afines / Engineering
profilometry
optical metrology
surface topography
Mirau interferometer.
title_short A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
title_full A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
title_fullStr A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
title_full_unstemmed A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
title_sort A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
dc.creator.fl_str_mv Arias-Hernández, Néstor Alonso
Molina Prado, Martha Lucía
Meneses Fonseca, Jaime Enrique
dc.contributor.author.spa.fl_str_mv Arias-Hernández, Néstor Alonso
Molina Prado, Martha Lucía
Meneses Fonseca, Jaime Enrique
dc.subject.ddc.spa.fl_str_mv 62 Ingeniería y operaciones afines / Engineering
topic 62 Ingeniería y operaciones afines / Engineering
profilometry
optical metrology
surface topography
Mirau interferometer.
dc.subject.proposal.spa.fl_str_mv profilometry
optical metrology
surface topography
Mirau interferometer.
description A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between Mirau objective and object surface. Topographic reconstructions of objects with dimensions of some tenths of millimeters were calculated with an accuracy of approximately 28 nanometers. Theoretical analysis and experimental results are shown.
publishDate 2015
dc.date.issued.spa.fl_str_mv 2015-03-01
dc.date.accessioned.spa.fl_str_mv 2019-07-02T18:59:06Z
dc.date.available.spa.fl_str_mv 2019-07-02T18:59:06Z
dc.type.spa.fl_str_mv Artículo de revista
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dc.type.driver.spa.fl_str_mv info:eu-repo/semantics/article
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dc.identifier.issn.spa.fl_str_mv ISSN: 2346-2183
dc.identifier.uri.none.fl_str_mv https://repositorio.unal.edu.co/handle/unal/60731
dc.identifier.eprints.spa.fl_str_mv http://bdigital.unal.edu.co/59063/
identifier_str_mv ISSN: 2346-2183
url https://repositorio.unal.edu.co/handle/unal/60731
http://bdigital.unal.edu.co/59063/
dc.language.iso.spa.fl_str_mv spa
language spa
dc.relation.spa.fl_str_mv https://revistas.unal.edu.co/index.php/dyna/article/view/42616
dc.relation.ispartof.spa.fl_str_mv Universidad Nacional de Colombia Revistas electrónicas UN Dyna
Dyna
dc.relation.references.spa.fl_str_mv Arias-Hernández, Néstor Alonso and Molina Prado, Martha Lucía and Meneses Fonseca, Jaime Enrique (2015) A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic. DYNA, 82 (190). pp. 153-159. ISSN 2346-2183
dc.rights.spa.fl_str_mv Derechos reservados - Universidad Nacional de Colombia
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.license.spa.fl_str_mv Atribución-NoComercial 4.0 Internacional
dc.rights.uri.spa.fl_str_mv http://creativecommons.org/licenses/by-nc/4.0/
dc.rights.accessrights.spa.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv Atribución-NoComercial 4.0 Internacional
Derechos reservados - Universidad Nacional de Colombia
http://creativecommons.org/licenses/by-nc/4.0/
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.mimetype.spa.fl_str_mv application/pdf
dc.publisher.spa.fl_str_mv Universidad Nacional de Colombia (Sede Medellín). Facultad de Minas.
institution Universidad Nacional de Colombia
bitstream.url.fl_str_mv https://repositorio.unal.edu.co/bitstream/unal/60731/1/42616-245784-1-PB.pdf
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repository.name.fl_str_mv Repositorio Institucional Universidad Nacional de Colombia
repository.mail.fl_str_mv repositorio_nal@unal.edu.co
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