A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic

A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between...

Full description

Autores:
Arias-Hernández, Néstor Alonso
Molina Prado, Martha Lucía
Meneses Fonseca, Jaime Enrique
Tipo de recurso:
Article of journal
Fecha de publicación:
2015
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/60731
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/60731
http://bdigital.unal.edu.co/59063/
Palabra clave:
62 Ingeniería y operaciones afines / Engineering
profilometry
optical metrology
surface topography
Mirau interferometer.
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional