A reconstruction of objets by interferometric profilometry with positioning system of labeled target periodic
A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between...
- Autores:
-
Arias-Hernández, Néstor Alonso
Molina Prado, Martha Lucía
Meneses Fonseca, Jaime Enrique
- Tipo de recurso:
- Article of journal
- Fecha de publicación:
- 2015
- Institución:
- Universidad Nacional de Colombia
- Repositorio:
- Universidad Nacional de Colombia
- Idioma:
- spa
- OAI Identifier:
- oai:repositorio.unal.edu.co:unal/60731
- Acceso en línea:
- https://repositorio.unal.edu.co/handle/unal/60731
http://bdigital.unal.edu.co/59063/
- Palabra clave:
- 62 Ingeniería y operaciones afines / Engineering
profilometry
optical metrology
surface topography
Mirau interferometer.
- Rights
- openAccess
- License
- Atribución-NoComercial 4.0 Internacional
| Summary: | A method to extract 3D information using a white light interferometer without using PZT is presented. Instead a positioning system that uses the phase sensitivity of a target periodic is employed. The image treatment realized on the periodic target permits to calculate the relative distance between Mirau objective and object surface. Topographic reconstructions of objects with dimensions of some tenths of millimeters were calculated with an accuracy of approximately 28 nanometers. Theoretical analysis and experimental results are shown. |
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