Modeling, simulation, dynamic optimization and control of a plasma assisted reactive evaporation process for preparation of Zinc Oxide (ZnO) thin films

In this work the modeling, simulation, dynamic optimization and control of a Plasma Assisted Reactive Evaporation process (PARE) for the deposition of Zinc Oxide (ZnO) thin films are proposed. Initially, a dimensional unsteady-state model was developed for the process, this model apply dynamic mater...