Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge
TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviour...
- Autores:
-
Restrepo Parra, Elisabeth
Arango Arango, Pedro José
Benavides Palacios, Vicente Javier
- Tipo de recurso:
- Article of journal
- Fecha de publicación:
- 2010
- Institución:
- Universidad Nacional de Colombia
- Repositorio:
- Universidad Nacional de Colombia
- Idioma:
- spa
- OAI Identifier:
- oai:repositorio.unal.edu.co:unal/37585
- Acceso en línea:
- https://repositorio.unal.edu.co/handle/unal/37585
http://bdigital.unal.edu.co/27669/
- Palabra clave:
- PAPVD
XPS
chemical composition
stoichiometry
depth profiles.
- Rights
- openAccess
- License
- Atribución-NoComercial 4.0 Internacional
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Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Restrepo Parra, Elisabethb0f71da3-6fff-42ef-b105-3cf17eda96a3300Arango Arango, Pedro José289cc012-da76-42a0-bf32-4547f0e1b286300Benavides Palacios, Vicente Javierdf6227f1-8fe8-4147-89eb-87c796b2bf6b3002019-06-28T01:51:04Z2019-06-28T01:51:04Z2010https://repositorio.unal.edu.co/handle/unal/37585http://bdigital.unal.edu.co/27669/TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviour of the Ti2p, N1s and C1s lines. Binding energy analysis confirmed TiN and TiC formation. The C1s and Ti2p peaks shifted with increasing XPS sputtering time, thus revealing hydrocarbides contamination. Furthermore, depth profiles of the TiN/TiC bilayers showed that the films grown at a substrate temperature of 150º C had a thicker TiN layer than the samples grown at 50º C. Nitrogen had diffused into the TiC layer and carbon into the TiN layer in both films.application/pdfspaUniversidad Nacional de Colombia Sede Medellínhttp://revistas.unal.edu.co/index.php/dyna/article/view/25538Universidad Nacional de Colombia Revistas electrónicas UN DynaDynaDyna; Vol. 77, núm. 163 (2010); 64-74 DYNA; Vol. 77, núm. 163 (2010); 64-74 2346-2183 0012-7353Restrepo Parra, Elisabeth and Arango Arango, Pedro José and Benavides Palacios, Vicente Javier (2010) Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge. Dyna; Vol. 77, núm. 163 (2010); 64-74 DYNA; Vol. 77, núm. 163 (2010); 64-74 2346-2183 0012-7353 .Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc dischargeArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTPAPVDXPSchemical compositionstoichiometrydepth profiles.ORIGINAL25538-89760-1-PB.pdfapplication/pdf665977https://repositorio.unal.edu.co/bitstream/unal/37585/1/25538-89760-1-PB.pdffdf0d303b82735035322d382411c13d3MD51THUMBNAIL25538-89760-1-PB.pdf.jpg25538-89760-1-PB.pdf.jpgGenerated Thumbnailimage/jpeg9091https://repositorio.unal.edu.co/bitstream/unal/37585/2/25538-89760-1-PB.pdf.jpg44d91d373c6b3d5ccdcb93883239c401MD52unal/37585oai:repositorio.unal.edu.co:unal/375852024-01-11 23:06:14.087Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co |
| dc.title.spa.fl_str_mv |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| title |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| spellingShingle |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge PAPVD XPS chemical composition stoichiometry depth profiles. |
| title_short |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| title_full |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| title_fullStr |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| title_full_unstemmed |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| title_sort |
Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge |
| dc.creator.fl_str_mv |
Restrepo Parra, Elisabeth Arango Arango, Pedro José Benavides Palacios, Vicente Javier |
| dc.contributor.author.spa.fl_str_mv |
Restrepo Parra, Elisabeth Arango Arango, Pedro José Benavides Palacios, Vicente Javier |
| dc.subject.proposal.spa.fl_str_mv |
PAPVD XPS chemical composition stoichiometry depth profiles. |
| topic |
PAPVD XPS chemical composition stoichiometry depth profiles. |
| description |
TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviour of the Ti2p, N1s and C1s lines. Binding energy analysis confirmed TiN and TiC formation. The C1s and Ti2p peaks shifted with increasing XPS sputtering time, thus revealing hydrocarbides contamination. Furthermore, depth profiles of the TiN/TiC bilayers showed that the films grown at a substrate temperature of 150º C had a thicker TiN layer than the samples grown at 50º C. Nitrogen had diffused into the TiC layer and carbon into the TiN layer in both films. |
| publishDate |
2010 |
| dc.date.issued.spa.fl_str_mv |
2010 |
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2019-06-28T01:51:04Z |
| dc.date.available.spa.fl_str_mv |
2019-06-28T01:51:04Z |
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Artículo de revista |
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http://purl.org/coar/resource_type/c_2df8fbb1 |
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info:eu-repo/semantics/article |
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info:eu-repo/semantics/publishedVersion |
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http://purl.org/coar/resource_type/c_6501 |
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http://purl.org/coar/version/c_970fb48d4fbd8a85 |
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Text |
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http://purl.org/redcol/resource_type/ART |
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publishedVersion |
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https://repositorio.unal.edu.co/handle/unal/37585 |
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http://bdigital.unal.edu.co/27669/ |
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https://repositorio.unal.edu.co/handle/unal/37585 http://bdigital.unal.edu.co/27669/ |
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spa |
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spa |
| dc.relation.spa.fl_str_mv |
http://revistas.unal.edu.co/index.php/dyna/article/view/25538 |
| dc.relation.ispartof.spa.fl_str_mv |
Universidad Nacional de Colombia Revistas electrónicas UN Dyna Dyna |
| dc.relation.ispartofseries.none.fl_str_mv |
Dyna; Vol. 77, núm. 163 (2010); 64-74 DYNA; Vol. 77, núm. 163 (2010); 64-74 2346-2183 0012-7353 |
| dc.relation.references.spa.fl_str_mv |
Restrepo Parra, Elisabeth and Arango Arango, Pedro José and Benavides Palacios, Vicente Javier (2010) Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge. Dyna; Vol. 77, núm. 163 (2010); 64-74 DYNA; Vol. 77, núm. 163 (2010); 64-74 2346-2183 0012-7353 . |
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Derechos reservados - Universidad Nacional de Colombia |
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http://purl.org/coar/access_right/c_abf2 |
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Atribución-NoComercial 4.0 Internacional |
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http://creativecommons.org/licenses/by-nc/4.0/ |
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info:eu-repo/semantics/openAccess |
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Atribución-NoComercial 4.0 Internacional Derechos reservados - Universidad Nacional de Colombia http://creativecommons.org/licenses/by-nc/4.0/ http://purl.org/coar/access_right/c_abf2 |
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Universidad Nacional de Colombia Sede Medellín |
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