Xps structure analysis of tin/tic bilayers produced by pulsed vacuum arc discharge

TiN/TiC Bilayers were grown on 304 stainless steel substrates using physical vapour deposition assisted by pulsed arc plasma system (PAPVD) at two substrate temperatures (50º C and 150º C). X ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition by observing the behaviour...

Full description

Autores:

Restrepo Parra, Elisabeth
Arango Arango, Pedro José
Benavides Palacios, Vicente Javier

Tipo de recurso:

Article of journal

Fecha de publicación:

2010

Institución:

Universidad Nacional de Colombia

Repositorio:

Universidad Nacional de Colombia

Idioma:

spa

OAI Identifier:

oai:repositorio.unal.edu.co:unal/37585

Acceso en línea:

https://repositorio.unal.edu.co/handle/unal/37585
http://bdigital.unal.edu.co/27669/

Palabra clave:

PAPVD
XPS
chemical composition
stoichiometry
depth profiles.

Rights

openAccess

License

Atribución-NoComercial 4.0 Internacional