Production and characterization of cr and crn hard coatings deposited by unbalanced magnetron sputtering

In this work, we present the results of Cr and CrN coatings deposited using unbalanced magnetron sputtering at different substrate temperatures. The layers with thickness and lt; 1μm were produced at different temperatures (100, 300 and 500 oC) on AISI H13 steel and (100) Silicon and analyzed by XRD...

Full description

Autores:
López Santos, Mónica B.
Tipo de recurso:
Article of journal
Fecha de publicación:
2013
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/74153
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/74153
http://bdigital.unal.edu.co/38630/
Palabra clave:
Recubrimientos duros
PVD - Sputtering con magnetrón desbalanceado
Cr
CrN.
Hard coatings
PVD - magnetron sputtering
Cr
CrN
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional