Caracterization of thin films by x’pert-pro panalytical difractometer
In this work, the structural characterization of thin films using a conventional diffraction equipment, brand X'Pert PRO PANalytical X-rays is described. A brief review of the theoretical diffraction techniques and X-ray reflectivity is included. In the experimental part the conditions necessar...
- Autores:
-
Tolosa, Jhonny
Ortiz, César A.
- Tipo de recurso:
- Article of journal
- Fecha de publicación:
- 2014
- Institución:
- Universidad Nacional de Colombia
- Repositorio:
- Universidad Nacional de Colombia
- Idioma:
- spa
- OAI Identifier:
- oai:repositorio.unal.edu.co:unal/50920
- Acceso en línea:
- https://repositorio.unal.edu.co/handle/unal/50920
http://bdigital.unal.edu.co/44962/
- Palabra clave:
- Película delgada
Difracción de rayos-X de haz rasante
reflectividad de rayos-X.
Thin films
grazing incidence X-ray diffraction
X-ray reflectivity
- Rights
- openAccess
- License
- Atribución-NoComercial 4.0 Internacional
| id |
UNACIONAL2_3f560cc82469d221ffeb91b8816b5bb6 |
|---|---|
| oai_identifier_str |
oai:repositorio.unal.edu.co:unal/50920 |
| network_acronym_str |
UNACIONAL2 |
| network_name_str |
Universidad Nacional de Colombia |
| repository_id_str |
|
| spelling |
Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Tolosa, Jhonnyc5ee67c0-3aff-4c4f-8209-763532f3a14c300Ortiz, César A.8f639299-087c-4008-b856-f71a9784ef043002019-06-29T11:03:47Z2019-06-29T11:03:47Z2014-09-13https://repositorio.unal.edu.co/handle/unal/50920http://bdigital.unal.edu.co/44962/In this work, the structural characterization of thin films using a conventional diffraction equipment, brand X'Pert PRO PANalytical X-rays is described. A brief review of the theoretical diffraction techniques and X-ray reflectivity is included. In the experimental part the conditions necessary for the assembly of the samples were determined on the computer using the settings grazing incidence and X-ray reflectivity. 11 different thin film samples were tested and the results of thickness and lattice parameter were obtained by the X'Pert HighScore Plus and X'pert Reflectivity programs respectively. The results suggest the feasibility of using a conventional X-ray equipment for the characterization of thin films.En este trabajo, se describe la caracterización estructural de películas delgadas empleando un equipo convencional de difracción de rayos-X, X’PERT PRO PANalytical. Se incluye una breve revisión teórica de las técnicas de difracción y reflectividad de rayos –X. En la parte experimental se determinaron las condiciones necesarias para el montaje de las muestras en el equipo, empleando las configuraciones de incidencia rasante y de reflectividad de rayos-X. Se analizaron 11 muestras diferentes de película delgada y los resultados de espesor y de parámetro de red se obtuvieron mediante los programas X’pert Reflectivity y X´pert HighScore Plus respectivamente. Los resultados obtenidos sugieren la viabilidad de emplear un equipo convencional de rayos-X para la caracterización de películas delgadas.application/pdfspaUniversidad Nacional de Colombia, Bogotáhttp://revistas.unal.edu.co/index.php/momento/article/view/45541Universidad Nacional de Colombia Revistas electrónicas UN MOMENTO - Revista de FísicaMOMENTO - Revista de FísicaMOMENTO - Revista de Física; núm. 48E (2014); 38-51 0121-4470Tolosa, Jhonny and Ortiz, César A. (2014) Caracterization of thin films by x’pert-pro panalytical difractometer. MOMENTO - Revista de Física; núm. 48E (2014); 38-51 0121-4470 .Caracterization of thin films by x’pert-pro panalytical difractometerArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTPelícula delgadaDifracción de rayos-X de haz rasantereflectividad de rayos-X.Thin filmsgrazing incidence X-ray diffractionX-ray reflectivityORIGINAL45541-219564-2-PB.pdfapplication/pdf735969https://repositorio.unal.edu.co/bitstream/unal/50920/1/45541-219564-2-PB.pdf118fd61bb1364265e871363017002aeeMD51THUMBNAIL45541-219564-2-PB.pdf.jpg45541-219564-2-PB.pdf.jpgGenerated Thumbnailimage/jpeg6979https://repositorio.unal.edu.co/bitstream/unal/50920/2/45541-219564-2-PB.pdf.jpg9e5d8e8132b2c9e914c5820f4d47668bMD52unal/50920oai:repositorio.unal.edu.co:unal/509202023-12-17 23:06:01.263Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co |
| dc.title.spa.fl_str_mv |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| title |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| spellingShingle |
Caracterization of thin films by x’pert-pro panalytical difractometer Película delgada Difracción de rayos-X de haz rasante reflectividad de rayos-X. Thin films grazing incidence X-ray diffraction X-ray reflectivity |
| title_short |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| title_full |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| title_fullStr |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| title_full_unstemmed |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| title_sort |
Caracterization of thin films by x’pert-pro panalytical difractometer |
| dc.creator.fl_str_mv |
Tolosa, Jhonny Ortiz, César A. |
| dc.contributor.author.spa.fl_str_mv |
Tolosa, Jhonny Ortiz, César A. |
| dc.subject.proposal.spa.fl_str_mv |
Película delgada Difracción de rayos-X de haz rasante reflectividad de rayos-X. Thin films grazing incidence X-ray diffraction X-ray reflectivity |
| topic |
Película delgada Difracción de rayos-X de haz rasante reflectividad de rayos-X. Thin films grazing incidence X-ray diffraction X-ray reflectivity |
| description |
In this work, the structural characterization of thin films using a conventional diffraction equipment, brand X'Pert PRO PANalytical X-rays is described. A brief review of the theoretical diffraction techniques and X-ray reflectivity is included. In the experimental part the conditions necessary for the assembly of the samples were determined on the computer using the settings grazing incidence and X-ray reflectivity. 11 different thin film samples were tested and the results of thickness and lattice parameter were obtained by the X'Pert HighScore Plus and X'pert Reflectivity programs respectively. The results suggest the feasibility of using a conventional X-ray equipment for the characterization of thin films. |
| publishDate |
2014 |
| dc.date.issued.spa.fl_str_mv |
2014-09-13 |
| dc.date.accessioned.spa.fl_str_mv |
2019-06-29T11:03:47Z |
| dc.date.available.spa.fl_str_mv |
2019-06-29T11:03:47Z |
| dc.type.spa.fl_str_mv |
Artículo de revista |
| dc.type.coar.fl_str_mv |
http://purl.org/coar/resource_type/c_2df8fbb1 |
| dc.type.driver.spa.fl_str_mv |
info:eu-repo/semantics/article |
| dc.type.version.spa.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
| dc.type.coar.spa.fl_str_mv |
http://purl.org/coar/resource_type/c_6501 |
| dc.type.coarversion.spa.fl_str_mv |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| dc.type.content.spa.fl_str_mv |
Text |
| dc.type.redcol.spa.fl_str_mv |
http://purl.org/redcol/resource_type/ART |
| format |
http://purl.org/coar/resource_type/c_6501 |
| status_str |
publishedVersion |
| dc.identifier.uri.none.fl_str_mv |
https://repositorio.unal.edu.co/handle/unal/50920 |
| dc.identifier.eprints.spa.fl_str_mv |
http://bdigital.unal.edu.co/44962/ |
| url |
https://repositorio.unal.edu.co/handle/unal/50920 http://bdigital.unal.edu.co/44962/ |
| dc.language.iso.spa.fl_str_mv |
spa |
| language |
spa |
| dc.relation.spa.fl_str_mv |
http://revistas.unal.edu.co/index.php/momento/article/view/45541 |
| dc.relation.ispartof.spa.fl_str_mv |
Universidad Nacional de Colombia Revistas electrónicas UN MOMENTO - Revista de Física MOMENTO - Revista de Física |
| dc.relation.ispartofseries.none.fl_str_mv |
MOMENTO - Revista de Física; núm. 48E (2014); 38-51 0121-4470 |
| dc.relation.references.spa.fl_str_mv |
Tolosa, Jhonny and Ortiz, César A. (2014) Caracterization of thin films by x’pert-pro panalytical difractometer. MOMENTO - Revista de Física; núm. 48E (2014); 38-51 0121-4470 . |
| dc.rights.spa.fl_str_mv |
Derechos reservados - Universidad Nacional de Colombia |
| dc.rights.coar.fl_str_mv |
http://purl.org/coar/access_right/c_abf2 |
| dc.rights.license.spa.fl_str_mv |
Atribución-NoComercial 4.0 Internacional |
| dc.rights.uri.spa.fl_str_mv |
http://creativecommons.org/licenses/by-nc/4.0/ |
| dc.rights.accessrights.spa.fl_str_mv |
info:eu-repo/semantics/openAccess |
| rights_invalid_str_mv |
Atribución-NoComercial 4.0 Internacional Derechos reservados - Universidad Nacional de Colombia http://creativecommons.org/licenses/by-nc/4.0/ http://purl.org/coar/access_right/c_abf2 |
| eu_rights_str_mv |
openAccess |
| dc.format.mimetype.spa.fl_str_mv |
application/pdf |
| dc.publisher.spa.fl_str_mv |
Universidad Nacional de Colombia, Bogotá |
| institution |
Universidad Nacional de Colombia |
| bitstream.url.fl_str_mv |
https://repositorio.unal.edu.co/bitstream/unal/50920/1/45541-219564-2-PB.pdf https://repositorio.unal.edu.co/bitstream/unal/50920/2/45541-219564-2-PB.pdf.jpg |
| bitstream.checksum.fl_str_mv |
118fd61bb1364265e871363017002aee 9e5d8e8132b2c9e914c5820f4d47668b |
| bitstream.checksumAlgorithm.fl_str_mv |
MD5 MD5 |
| repository.name.fl_str_mv |
Repositorio Institucional Universidad Nacional de Colombia |
| repository.mail.fl_str_mv |
repositorio_nal@unal.edu.co |
| _version_ |
1814089786888028160 |