Unbalanced magnetron sputtering system for producing corrosion resistance multilayer coatings

In this work, an unbalanced magnetron sputtering system which allows for the production of corrosion resistance multilayer coatings is described. The major advantage of this system is that it combines features such as a multi-cathode setup, temperature control, control over the rotation of the sampl...

Full description

Autores:
Marulanda Cardona, Diana Maritza
Olaya Flórez, Jhon Jairo
Tipo de recurso:
Article of journal
Fecha de publicación:
2012
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/40597
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/40597
http://bdigital.unal.edu.co/30694/
Palabra clave:
unbalanced magnetron sputtering (UBM)
corrosion
multilayers
Cr/CrN
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional