Electrical properties of cr/crn nano-multilayers produced by the unbalanced magnetron sputtering technique

Chromium nitride (CrN) films have been applied to several steels as protective coatings against wear and corrosion due to their excellent mechanical properties and corrosion resistance, and in the electronic field these films are commonly used due to their low electrical resistivity. However, it has...

Full description

Autores:
Marulanda Cardona, Diana Maritza
Olaya Flórez, Jhon Jairo
Tipo de recurso:
Article of journal
Fecha de publicación:
2011
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/37990
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/37990
http://bdigital.unal.edu.co/28075/
Palabra clave:
Multilayers
unbalanced magnetron sputtering
UBM
Cr/CrN
resistivity
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional