Macroporous silicon: efficient antireflective layer on crystalline silicon

A macroporous silicon layer (ma-PS) electrochemically grown on crystalline silicon surface can be used as an efficient antireflective layer in optical devices as antireflection coating. In this work, we presented the ma-PS layers fabricated on crystalline silicon (c-Si) n-type and p +-type, obtained...

Full description

Autores:
Fonthal Rico, Faruk
Torres Chavez, Ivaldo
Rodríguez, Ángel
Tipo de recurso:
Article of journal
Fecha de publicación:
2011
Institución:
Universidad Autónoma de Occidente
Repositorio:
RED: Repositorio Educativo Digital UAO
Idioma:
eng
OAI Identifier:
oai:red.uao.edu.co:10614/11912
Acceso en línea:
http://hdl.handle.net/10614/11912
Palabra clave:
Porous Silicon
Crystalline silicon
Etching time
Electrochemical etching
Antireflective coating
Silicio poroso
Rights
openAccess
License
Derechos Reservados - Universidad Autónoma de Occidente