Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering

TixAl1-xN coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscop

Autores:
Devia, D M
Rodriguez-Restrepo, L. V
Restrepo-Parra, E
Tipo de recurso:
Fecha de publicación:
2014
Institución:
Universidad EAFIT
Repositorio:
Repositorio EAFIT
Idioma:
eng
OAI Identifier:
oai:repository.eafit.edu.co:10784/14397
Acceso en línea:
http://hdl.handle.net/10784/14397
Palabra clave:
Tialn
Bias Voltage
Sputtering
Atomic Percentage
Xrd
Tialn
Voltaje De Polarización
Pulverización Catódica
Porcentaje Atómico
Drx
Rights
License
Copyright (c) 2014 D M Devia, E Restrepo-Parra, J M Vélez-Restrepo
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spelling Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees2014-06-242019-11-22T16:48:49Z2014-06-242019-11-22T16:48:49Z2256-43141794-9165http://hdl.handle.net/10784/1439710.17230/ingciencia.10.20.4TixAl1-xN coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscopLos recubrimientos TixAl1-xN se cultivaron usando la técnica de pulverización catódica con magnetrón triodo, variando el voltaje de polarización entre -40 V y -150V. La influencia del voltaje de polarización en las propiedades estructurales y morfológicasapplication/pdfengUniversidad EAFIThttp://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038Copyright (c) 2014 D M Devia, E Restrepo-Parra, J M Vélez-RestrepoAcceso abiertohttp://purl.org/coar/access_right/c_abf2instname:Universidad EAFITreponame:Repositorio Institucional Universidad EAFITIngeniería y Ciencia; Vol 10, No 20 (2014)Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron SputteringPropiedades morfológicas y estructurales de recubrimientos nitruro de titanio aluminio producidos por magnetron sputtering tríodoarticleinfo:eu-repo/semantics/articlepublishedVersioninfo:eu-repo/semantics/publishedVersionArtículohttp://purl.org/coar/version/c_970fb48d4fbd8a85http://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1TialnBias VoltageSputteringAtomic PercentageXrdTialnVoltaje De PolarizaciónPulverización CatódicaPorcentaje AtómicoDrxDevia, D MRodriguez-Restrepo, L. VRestrepo-Parra, EUniversidad Tecnológica de PereiraUniversidad Nacional de ColombiaIngeniería y Ciencia10205164ing.cienc.ORIGINAL4.pdf4.pdfTexto completo PDFapplication/pdf893593https://repository.eafit.edu.co/bitstreams/b50e9882-6a76-4d8e-a4d6-207f1444af26/downloadd2dc27141884524858f86ceebc83136dMD52articulo.htmlarticulo.htmlTexto completo HTMLtext/html374https://repository.eafit.edu.co/bitstreams/810d554b-e48e-4b69-8339-28a5d86b2959/downloadbb7038451faaa675d7e41ed7927d5d65MD53THUMBNAILminaitura-ig_Mesa de trabajo 1.jpgminaitura-ig_Mesa de trabajo 1.jpgimage/jpeg265796https://repository.eafit.edu.co/bitstreams/bf53bdd4-209d-430a-9ccc-883d6cbad59d/downloadda9b21a5c7e00c7f1127cef8e97035e0MD5110784/14397oai:repository.eafit.edu.co:10784/143972020-03-01 23:23:59.241open.accesshttps://repository.eafit.edu.coRepositorio Institucional Universidad EAFITrepositorio@eafit.edu.co
dc.title.eng.fl_str_mv Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
dc.title.spa.fl_str_mv Propiedades morfológicas y estructurales de recubrimientos nitruro de titanio aluminio producidos por magnetron sputtering tríodo
title Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
spellingShingle Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
Tialn
Bias Voltage
Sputtering
Atomic Percentage
Xrd
Tialn
Voltaje De Polarización
Pulverización Catódica
Porcentaje Atómico
Drx
title_short Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
title_full Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
title_fullStr Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
title_full_unstemmed Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
title_sort Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
dc.creator.fl_str_mv Devia, D M
Rodriguez-Restrepo, L. V
Restrepo-Parra, E
dc.contributor.author.spa.fl_str_mv Devia, D M
Rodriguez-Restrepo, L. V
Restrepo-Parra, E
dc.contributor.affiliation.spa.fl_str_mv Universidad Tecnológica de Pereira
Universidad Nacional de Colombia
dc.subject.keyword.eng.fl_str_mv Tialn
Bias Voltage
Sputtering
Atomic Percentage
Xrd
topic Tialn
Bias Voltage
Sputtering
Atomic Percentage
Xrd
Tialn
Voltaje De Polarización
Pulverización Catódica
Porcentaje Atómico
Drx
dc.subject.keyword.spa.fl_str_mv Tialn
Voltaje De Polarización
Pulverización Catódica
Porcentaje Atómico
Drx
description TixAl1-xN coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscop
publishDate 2014
dc.date.issued.none.fl_str_mv 2014-06-24
dc.date.available.none.fl_str_mv 2019-11-22T16:48:49Z
dc.date.accessioned.none.fl_str_mv 2019-11-22T16:48:49Z
dc.date.none.fl_str_mv 2014-06-24
dc.type.eng.fl_str_mv article
info:eu-repo/semantics/article
publishedVersion
info:eu-repo/semantics/publishedVersion
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http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.local.spa.fl_str_mv Artículo
status_str publishedVersion
dc.identifier.issn.none.fl_str_mv 2256-4314
1794-9165
dc.identifier.uri.none.fl_str_mv http://hdl.handle.net/10784/14397
dc.identifier.doi.none.fl_str_mv 10.17230/ingciencia.10.20.4
identifier_str_mv 2256-4314
1794-9165
10.17230/ingciencia.10.20.4
url http://hdl.handle.net/10784/14397
dc.language.iso.eng.fl_str_mv eng
language eng
dc.relation.isversionof.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038
dc.relation.uri.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2038
dc.rights.eng.fl_str_mv Copyright (c) 2014 D M Devia, E Restrepo-Parra, J M Vélez-Restrepo
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.local.spa.fl_str_mv Acceso abierto
rights_invalid_str_mv Copyright (c) 2014 D M Devia, E Restrepo-Parra, J M Vélez-Restrepo
Acceso abierto
http://purl.org/coar/access_right/c_abf2
dc.format.none.fl_str_mv application/pdf
dc.coverage.spatial.eng.fl_str_mv Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees
dc.publisher.spa.fl_str_mv Universidad EAFIT
dc.source.none.fl_str_mv instname:Universidad EAFIT
reponame:Repositorio Institucional Universidad EAFIT
dc.source.spa.fl_str_mv Ingeniería y Ciencia; Vol 10, No 20 (2014)
instname_str Universidad EAFIT
institution Universidad EAFIT
reponame_str Repositorio Institucional Universidad EAFIT
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