Influence of substrate temperature on the microstructure of TiN/TiC
The TiN / TiC bilayers were deposited using the plasma-assisted vapor phase deposition (PAPVD) -Arch Pulsed technique, varying the substrate temperature in a range of 100-120 ± C, with intervals of 5 ± C. The coatings were analyzed by means of XPS and XRD. From the treatment of the signals of the na...
- Autores:
-
Devia, D M
Mesa, Fernando
Arango, Pedro José
- Tipo de recurso:
- Fecha de publicación:
- 2011
- Institución:
- Universidad EAFIT
- Repositorio:
- Repositorio EAFIT
- Idioma:
- spa
- OAI Identifier:
- oai:repository.eafit.edu.co:10784/14464
- Acceso en línea:
- http://hdl.handle.net/10784/14464
- Palabra clave:
- Pulsed Arc
Microstructure
Tin / Tic
Xps
Xrd
Arco Pulsado
Microestructura
Tin/Tic
Xps
Xrd
- Rights
- License
- Copyright (c) 2011 D M Devia, Fernando Mesa, Pedro José Arango
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Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees2011-12-012019-11-22T18:55:36Z2011-12-012019-11-22T18:55:36Z2256-43141794-9165http://hdl.handle.net/10784/14464The TiN / TiC bilayers were deposited using the plasma-assisted vapor phase deposition (PAPVD) -Arch Pulsed technique, varying the substrate temperature in a range of 100-120 ± C, with intervals of 5 ± C. The coatings were analyzed by means of XPS and XRD. From the treatment of the signals of the narrow spectra of XPS and the XRD patterns, the formation of the compounds TiN (Titanium Nitride), TiC (Titanium Carbide) and TiCN (titanium carbide) in the crystallographic phase was determined fm-3m corresponding to the FCC phases of these synthesized compounds.Las bicapas de TiN/TiC se depositaron utilizando la técnica de deposición en fase vapor asistido por plasma (PAPVD)-Arco Pulsado, variando la temperatura del sustrato en un rango de 100-120±C, con intervalos de 5±C. Los recubrimientos se analizaron por medio de XPS y XRD. A partir del tratamiento de las señales de los espectros angostos de XPS y los patrones de XRD, se determino la formación de los compuestos TiN (Nitruro de Titanio), TiC (Carburo de Titanio) y TiCN (carbonitruro de titanio) en la fase cristalográfica fm-3m correspondiente a las fases FCC de estos compuestos sintetizados.application/pdfspaUniversidad EAFIThttp://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/426http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/426Copyright (c) 2011 D M Devia, Fernando Mesa, Pedro José ArangoAcceso abiertohttp://purl.org/coar/access_right/c_abf2instname:Universidad EAFITreponame:Repositorio Institucional Universidad EAFITIngeniería y Ciencia; Vol 7, No 14 (2011)Influence of substrate temperature on the microstructure of TiN/TiCInfluencia de la temperatura del sustrato en la microestructura de recubrimientos de TiN/TiCarticleinfo:eu-repo/semantics/articlepublishedVersioninfo:eu-repo/semantics/publishedVersionArtículohttp://purl.org/coar/version/c_970fb48d4fbd8a85http://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1Pulsed ArcMicrostructureTin / TicXpsXrdArco PulsadoMicroestructuraTin/TicXpsXrdDevia, D M445c236d-6383-4af2-8799-dfac958a6fa9-1Mesa, Fernando6fc04a40-c46b-4345-856b-1dcc51749afd-1Arango, Pedro Joséeeee13fa-d419-473a-9a22-ec7b4f65ea59-1Universidad Tecnológica de PereiraUniversidad Tecnológica de PereiraUniversidad Nacional de Colombia, sede ManizalesIngeniería y Ciencia7147182ing.cienc.ORIGINAL4.pdf4.pdfTexto completo PDFapplication/pdf195383https://repository.eafit.edu.co/bitstreams/e4e2e847-8f5e-4cae-9cda-9850c6c1e967/downloaddde24158a2b52e3f3ffbf60b1ce8ddacMD51articulo.htmlarticulo.htmlTexto completo HTMLtext/html373https://repository.eafit.edu.co/bitstreams/c0187f0d-bd82-468a-809b-29523a853807/download02e3a3c196b91fb00e4125b0ec485a9aMD53THUMBNAILminaitura-ig_Mesa de trabajo 1.jpgminaitura-ig_Mesa de trabajo 1.jpgimage/jpeg265796https://repository.eafit.edu.co/bitstreams/054633a7-6454-4dff-a3c1-85e1641fc1c3/downloadda9b21a5c7e00c7f1127cef8e97035e0MD5210784/14464oai:repository.eafit.edu.co:10784/144642024-12-04 11:48:06.206open.accesshttps://repository.eafit.edu.coRepositorio Institucional Universidad EAFITrepositorio@eafit.edu.co |
| dc.title.eng.fl_str_mv |
Influence of substrate temperature on the microstructure of TiN/TiC |
| dc.title.spa.fl_str_mv |
Influencia de la temperatura del sustrato en la microestructura de recubrimientos de TiN/TiC |
| title |
Influence of substrate temperature on the microstructure of TiN/TiC |
| spellingShingle |
Influence of substrate temperature on the microstructure of TiN/TiC Pulsed Arc Microstructure Tin / Tic Xps Xrd Arco Pulsado Microestructura Tin/Tic Xps Xrd |
| title_short |
Influence of substrate temperature on the microstructure of TiN/TiC |
| title_full |
Influence of substrate temperature on the microstructure of TiN/TiC |
| title_fullStr |
Influence of substrate temperature on the microstructure of TiN/TiC |
| title_full_unstemmed |
Influence of substrate temperature on the microstructure of TiN/TiC |
| title_sort |
Influence of substrate temperature on the microstructure of TiN/TiC |
| dc.creator.fl_str_mv |
Devia, D M Mesa, Fernando Arango, Pedro José |
| dc.contributor.author.spa.fl_str_mv |
Devia, D M Mesa, Fernando Arango, Pedro José |
| dc.contributor.affiliation.spa.fl_str_mv |
Universidad Tecnológica de Pereira Universidad Tecnológica de Pereira Universidad Nacional de Colombia, sede Manizales |
| dc.subject.keyword.eng.fl_str_mv |
Pulsed Arc Microstructure Tin / Tic Xps Xrd |
| topic |
Pulsed Arc Microstructure Tin / Tic Xps Xrd Arco Pulsado Microestructura Tin/Tic Xps Xrd |
| dc.subject.keyword.spa.fl_str_mv |
Arco Pulsado Microestructura Tin/Tic Xps Xrd |
| description |
The TiN / TiC bilayers were deposited using the plasma-assisted vapor phase deposition (PAPVD) -Arch Pulsed technique, varying the substrate temperature in a range of 100-120 ± C, with intervals of 5 ± C. The coatings were analyzed by means of XPS and XRD. From the treatment of the signals of the narrow spectra of XPS and the XRD patterns, the formation of the compounds TiN (Titanium Nitride), TiC (Titanium Carbide) and TiCN (titanium carbide) in the crystallographic phase was determined fm-3m corresponding to the FCC phases of these synthesized compounds. |
| publishDate |
2011 |
| dc.date.issued.none.fl_str_mv |
2011-12-01 |
| dc.date.available.none.fl_str_mv |
2019-11-22T18:55:36Z |
| dc.date.accessioned.none.fl_str_mv |
2019-11-22T18:55:36Z |
| dc.date.none.fl_str_mv |
2011-12-01 |
| dc.type.eng.fl_str_mv |
article info:eu-repo/semantics/article publishedVersion info:eu-repo/semantics/publishedVersion |
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http://purl.org/coar/version/c_970fb48d4fbd8a85 |
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http://purl.org/coar/resource_type/c_6501 http://purl.org/coar/resource_type/c_2df8fbb1 |
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Artículo |
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publishedVersion |
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2256-4314 1794-9165 |
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http://hdl.handle.net/10784/14464 |
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2256-4314 1794-9165 |
| url |
http://hdl.handle.net/10784/14464 |
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spa |
| language |
spa |
| dc.relation.isversionof.none.fl_str_mv |
http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/426 |
| dc.relation.uri.none.fl_str_mv |
http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/426 |
| dc.rights.eng.fl_str_mv |
Copyright (c) 2011 D M Devia, Fernando Mesa, Pedro José Arango |
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http://purl.org/coar/access_right/c_abf2 |
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Acceso abierto |
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Copyright (c) 2011 D M Devia, Fernando Mesa, Pedro José Arango Acceso abierto http://purl.org/coar/access_right/c_abf2 |
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application/pdf |
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Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees |
| dc.publisher.spa.fl_str_mv |
Universidad EAFIT |
| dc.source.none.fl_str_mv |
instname:Universidad EAFIT reponame:Repositorio Institucional Universidad EAFIT |
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Ingeniería y Ciencia; Vol 7, No 14 (2011) |
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