Influence of substrate temperature on the microstructure of TiN/TiC

The TiN / TiC bilayers were deposited using the plasma-assisted vapor phase deposition (PAPVD) -Arch Pulsed technique, varying the substrate temperature in a range of 100-120 ± C, with intervals of 5 ± C. The coatings were analyzed by means of XPS and XRD. From the treatment of the signals of the na...

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Autores:
Devia, D M
Mesa, Fernando
Arango, Pedro José
Tipo de recurso:
Fecha de publicación:
2011
Institución:
Universidad EAFIT
Repositorio:
Repositorio EAFIT
Idioma:
spa
OAI Identifier:
oai:repository.eafit.edu.co:10784/14464
Acceso en línea:
http://hdl.handle.net/10784/14464
Palabra clave:
Pulsed Arc
Microstructure
Tin / Tic
Xps
Xrd
Arco Pulsado
Microestructura
Tin/Tic
Xps
Xrd
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Copyright (c) 2011 D M Devia, Fernando Mesa, Pedro José Arango