Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials

Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materia...

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Autores:
Ramírez-Ramírez, Sebastián
Sabogal-Suárez, Daniel Alejandro
Devia-Narváez, Diego Fernando
Restrepo-Parra, Elisabeth
Tipo de recurso:
Article of journal
Fecha de publicación:
2018
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/68553
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/68553
http://bdigital.unal.edu.co/69586/
Palabra clave:
62 Ingeniería y operaciones afines / Engineering
modeling
arc discharge
plasma static behavior
cathode material
modelamiento
descarga de arco
comportamiento estacionario del plasma
material del cátodo
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional
id UNACIONAL2_f1ea8b0103dd42edf660b23529a3c55d
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spelling Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Ramírez-Ramírez, Sebastián0952b36f-31f9-44c4-80e2-e5a49001c02c300Sabogal-Suárez, Daniel Alejandroe268276a-ed7d-46fc-a5e1-68f14a096a77300Devia-Narváez, Diego Fernandoade98e17-b86e-4908-ad9c-8f40709da69e300Restrepo-Parra, Elisabethb0f71da3-6fff-42ef-b105-3cf17eda96a33002019-07-03T07:06:39Z2019-07-03T07:06:39Z2018-01-01ISSN: 2346-2183https://repositorio.unal.edu.co/handle/unal/68553http://bdigital.unal.edu.co/69586/Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materials that are commonly used in a cathodic arc deposition. The electron temperature, density, and electric potential were found to decrease as function of the distance from the spot region. However, the ion kinetic energy tends to increase due to the acceleration of the ions coming from the bulk region. Our results show that the cathodic arc is not directly affected by the plasma potential of the glow plasma and that the cathode material has an important influence on the plasma behavior, mainly because of the electrical and thermal conductivity of each material.Las técnicas asistidas por plasma han sido ampliamente utilizadas para la deposición de películas delgadas y recubrimientos metalúrgicos de alta calidad. La descarga luminiscente producida en la región entre electrodos y cámara de un arco catódico fue modelada. El comportamiento del plasma fue caracterizado para diferentes materiales del cátodo comúnmente utilizados en descarga de arco catódico. Se encontró que la temperatura electrónica, densidad y potencial eléctrico decrecen como función de la distancia desde la región de puntos catódicos. Sin embargo, la energía cinética del ion tiende a incrementar debido a la aceleración de los iones provenientes de la región central del arco. Nuestros resultados muestran que el arco catódico no es directamente afectado por el potencial del plasma de la descarga luminiscente y que el material del cátodo tiene una influencia importante en el comportamiento del plasma, principalmente debido a la conductividad eléctrica y térmica de cada material.application/pdfspaUniversidad Nacional de Colombia - Sede Medellín - Facultad de Minashttps://revistas.unal.edu.co/index.php/dyna/article/view/65167Universidad Nacional de Colombia Revistas electrónicas UN DynaDynaRamírez-Ramírez, Sebastián and Sabogal-Suárez, Daniel Alejandro and Devia-Narváez, Diego Fernando and Restrepo-Parra, Elisabeth (2018) Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials. DYNA, 85 (204). pp. 76-82. ISSN 2346-218362 Ingeniería y operaciones afines / Engineeringmodelingarc dischargeplasma static behaviorcathode materialmodelamientodescarga de arcocomportamiento estacionario del plasmamaterial del cátodoStudy of the plasma behavior produced by a vacuum arc discharge for different cathode materialsArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTORIGINAL65167-376271-3-PB.pdfapplication/pdf735319https://repositorio.unal.edu.co/bitstream/unal/68553/1/65167-376271-3-PB.pdffa0a026c5eeca80fbeb9ef93ce3c1a45MD51THUMBNAIL65167-376271-3-PB.pdf.jpg65167-376271-3-PB.pdf.jpgGenerated Thumbnailimage/jpeg9652https://repositorio.unal.edu.co/bitstream/unal/68553/2/65167-376271-3-PB.pdf.jpgc0ef7270476ddff748f51471bf03ed32MD52unal/68553oai:repositorio.unal.edu.co:unal/685532024-05-27 23:09:33.267Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co
dc.title.spa.fl_str_mv Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
title Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
spellingShingle Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
62 Ingeniería y operaciones afines / Engineering
modeling
arc discharge
plasma static behavior
cathode material
modelamiento
descarga de arco
comportamiento estacionario del plasma
material del cátodo
title_short Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
title_full Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
title_fullStr Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
title_full_unstemmed Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
title_sort Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials
dc.creator.fl_str_mv Ramírez-Ramírez, Sebastián
Sabogal-Suárez, Daniel Alejandro
Devia-Narváez, Diego Fernando
Restrepo-Parra, Elisabeth
dc.contributor.author.spa.fl_str_mv Ramírez-Ramírez, Sebastián
Sabogal-Suárez, Daniel Alejandro
Devia-Narváez, Diego Fernando
Restrepo-Parra, Elisabeth
dc.subject.ddc.spa.fl_str_mv 62 Ingeniería y operaciones afines / Engineering
topic 62 Ingeniería y operaciones afines / Engineering
modeling
arc discharge
plasma static behavior
cathode material
modelamiento
descarga de arco
comportamiento estacionario del plasma
material del cátodo
dc.subject.proposal.spa.fl_str_mv modeling
arc discharge
plasma static behavior
cathode material
modelamiento
descarga de arco
comportamiento estacionario del plasma
material del cátodo
description Plasma-assisted techniques have been widely used for deposition of high quality thin films and metallurgical coatings. The glow plasma produced in the region between the electrodes and the chamber wall of a cathodic arc was modeled. The plasma behavior was characterized for different cathode materials that are commonly used in a cathodic arc deposition. The electron temperature, density, and electric potential were found to decrease as function of the distance from the spot region. However, the ion kinetic energy tends to increase due to the acceleration of the ions coming from the bulk region. Our results show that the cathodic arc is not directly affected by the plasma potential of the glow plasma and that the cathode material has an important influence on the plasma behavior, mainly because of the electrical and thermal conductivity of each material.
publishDate 2018
dc.date.issued.spa.fl_str_mv 2018-01-01
dc.date.accessioned.spa.fl_str_mv 2019-07-03T07:06:39Z
dc.date.available.spa.fl_str_mv 2019-07-03T07:06:39Z
dc.type.spa.fl_str_mv Artículo de revista
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dc.type.content.spa.fl_str_mv Text
dc.type.redcol.spa.fl_str_mv http://purl.org/redcol/resource_type/ART
format http://purl.org/coar/resource_type/c_6501
status_str publishedVersion
dc.identifier.issn.spa.fl_str_mv ISSN: 2346-2183
dc.identifier.uri.none.fl_str_mv https://repositorio.unal.edu.co/handle/unal/68553
dc.identifier.eprints.spa.fl_str_mv http://bdigital.unal.edu.co/69586/
identifier_str_mv ISSN: 2346-2183
url https://repositorio.unal.edu.co/handle/unal/68553
http://bdigital.unal.edu.co/69586/
dc.language.iso.spa.fl_str_mv spa
language spa
dc.relation.spa.fl_str_mv https://revistas.unal.edu.co/index.php/dyna/article/view/65167
dc.relation.ispartof.spa.fl_str_mv Universidad Nacional de Colombia Revistas electrónicas UN Dyna
Dyna
dc.relation.references.spa.fl_str_mv Ramírez-Ramírez, Sebastián and Sabogal-Suárez, Daniel Alejandro and Devia-Narváez, Diego Fernando and Restrepo-Parra, Elisabeth (2018) Study of the plasma behavior produced by a vacuum arc discharge for different cathode materials. DYNA, 85 (204). pp. 76-82. ISSN 2346-2183
dc.rights.spa.fl_str_mv Derechos reservados - Universidad Nacional de Colombia
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.license.spa.fl_str_mv Atribución-NoComercial 4.0 Internacional
dc.rights.uri.spa.fl_str_mv http://creativecommons.org/licenses/by-nc/4.0/
dc.rights.accessrights.spa.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv Atribución-NoComercial 4.0 Internacional
Derechos reservados - Universidad Nacional de Colombia
http://creativecommons.org/licenses/by-nc/4.0/
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.mimetype.spa.fl_str_mv application/pdf
dc.publisher.spa.fl_str_mv Universidad Nacional de Colombia - Sede Medellín - Facultad de Minas
institution Universidad Nacional de Colombia
bitstream.url.fl_str_mv https://repositorio.unal.edu.co/bitstream/unal/68553/1/65167-376271-3-PB.pdf
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