Local anodic oxidation on silicon (100) substrates using atomic force microscopy

A characterization of local anodic oxidation using scanning probe microscopy is performed on a (100) silicon substrate. The formation of patterns varies as a function of voltage, humidity, and scanning speed. A set of experiments is presented to analyze the voltage and scanning speed dependence unde...

Full description

Autores:
Ávila Bernal, Alba Graciela
Bonilla Osorio, Ruy Sebastián
Tipo de recurso:
Article of journal
Fecha de publicación:
2012
Institución:
Universidad Nacional de Colombia
Repositorio:
Universidad Nacional de Colombia
Idioma:
spa
OAI Identifier:
oai:repositorio.unal.edu.co:unal/44470
Acceso en línea:
https://repositorio.unal.edu.co/handle/unal/44470
http://bdigital.unal.edu.co/34569/
Palabra clave:
LAO
AFM
Nano-patterns
Rights
openAccess
License
Atribución-NoComercial 4.0 Internacional
id UNACIONAL2_8dd4c06846e9aa1ea523f17699814180
oai_identifier_str oai:repositorio.unal.edu.co:unal/44470
network_acronym_str UNACIONAL2
network_name_str Universidad Nacional de Colombia
repository_id_str
spelling Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Ávila Bernal, Alba Gracielae15ef2a2-e485-4bbb-8fcc-b49f993c116b300Bonilla Osorio, Ruy Sebastiánb3752cdc-e1ff-4eee-8233-4a6d1a95b1163002019-06-28T13:35:49Z2019-06-28T13:35:49Z2012https://repositorio.unal.edu.co/handle/unal/44470http://bdigital.unal.edu.co/34569/A characterization of local anodic oxidation using scanning probe microscopy is performed on a (100) silicon substrate. The formation of patterns varies as a function of voltage, humidity, and scanning speed. A set of experiments is presented to analyze the voltage and scanning speed dependence under stable environmental conditions (50.5% relative humidity, 22 °C, and 767 mmHg). A finer control of the dimensions of the local oxidation patterns is attained at low voltages and low scanning speeds. Oxide ridges are observed at high voltages independently of the writing speed. Their presence sets up an upper limit for the oxide pattern formation.application/pdfspaUniversidad Nacional de Colombia Sede Medellínhttp://revistas.unal.edu.co/index.php/dyna/article/view/34742Universidad Nacional de Colombia Revistas electrónicas UN DynaDynaDyna; Vol. 79, núm. 174 (2012); 58-61 DYNA; Vol. 79, núm. 174 (2012); 58-61 2346-2183 0012-7353Ávila Bernal, Alba Graciela and Bonilla Osorio, Ruy Sebastián (2012) Local anodic oxidation on silicon (100) substrates using atomic force microscopy. Dyna; Vol. 79, núm. 174 (2012); 58-61 DYNA; Vol. 79, núm. 174 (2012); 58-61 2346-2183 0012-7353 .Local anodic oxidation on silicon (100) substrates using atomic force microscopyArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTLAOAFMNano-patternsORIGINAL34742-191288-1-PB.htmltext/html15949https://repositorio.unal.edu.co/bitstream/unal/44470/1/34742-191288-1-PB.html783363ad1146d439866b8ee566f452c3MD5134742-135268-1-PB.pdfapplication/pdf2012462https://repositorio.unal.edu.co/bitstream/unal/44470/2/34742-135268-1-PB.pdf232a1c982763a361514e8ad64b052a91MD52THUMBNAIL34742-135268-1-PB.pdf.jpg34742-135268-1-PB.pdf.jpgGenerated Thumbnailimage/jpeg9008https://repositorio.unal.edu.co/bitstream/unal/44470/3/34742-135268-1-PB.pdf.jpg646d14db4da90c185ab0329b70d8846cMD53unal/44470oai:repositorio.unal.edu.co:unal/444702023-02-17 23:04:49.252Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co
dc.title.spa.fl_str_mv Local anodic oxidation on silicon (100) substrates using atomic force microscopy
title Local anodic oxidation on silicon (100) substrates using atomic force microscopy
spellingShingle Local anodic oxidation on silicon (100) substrates using atomic force microscopy
LAO
AFM
Nano-patterns
title_short Local anodic oxidation on silicon (100) substrates using atomic force microscopy
title_full Local anodic oxidation on silicon (100) substrates using atomic force microscopy
title_fullStr Local anodic oxidation on silicon (100) substrates using atomic force microscopy
title_full_unstemmed Local anodic oxidation on silicon (100) substrates using atomic force microscopy
title_sort Local anodic oxidation on silicon (100) substrates using atomic force microscopy
dc.creator.fl_str_mv Ávila Bernal, Alba Graciela
Bonilla Osorio, Ruy Sebastián
dc.contributor.author.spa.fl_str_mv Ávila Bernal, Alba Graciela
Bonilla Osorio, Ruy Sebastián
dc.subject.proposal.spa.fl_str_mv LAO
AFM
Nano-patterns
topic LAO
AFM
Nano-patterns
description A characterization of local anodic oxidation using scanning probe microscopy is performed on a (100) silicon substrate. The formation of patterns varies as a function of voltage, humidity, and scanning speed. A set of experiments is presented to analyze the voltage and scanning speed dependence under stable environmental conditions (50.5% relative humidity, 22 °C, and 767 mmHg). A finer control of the dimensions of the local oxidation patterns is attained at low voltages and low scanning speeds. Oxide ridges are observed at high voltages independently of the writing speed. Their presence sets up an upper limit for the oxide pattern formation.
publishDate 2012
dc.date.issued.spa.fl_str_mv 2012
dc.date.accessioned.spa.fl_str_mv 2019-06-28T13:35:49Z
dc.date.available.spa.fl_str_mv 2019-06-28T13:35:49Z
dc.type.spa.fl_str_mv Artículo de revista
dc.type.coar.fl_str_mv http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.driver.spa.fl_str_mv info:eu-repo/semantics/article
dc.type.version.spa.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.coar.spa.fl_str_mv http://purl.org/coar/resource_type/c_6501
dc.type.coarversion.spa.fl_str_mv http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.content.spa.fl_str_mv Text
dc.type.redcol.spa.fl_str_mv http://purl.org/redcol/resource_type/ART
format http://purl.org/coar/resource_type/c_6501
status_str publishedVersion
dc.identifier.uri.none.fl_str_mv https://repositorio.unal.edu.co/handle/unal/44470
dc.identifier.eprints.spa.fl_str_mv http://bdigital.unal.edu.co/34569/
url https://repositorio.unal.edu.co/handle/unal/44470
http://bdigital.unal.edu.co/34569/
dc.language.iso.spa.fl_str_mv spa
language spa
dc.relation.spa.fl_str_mv http://revistas.unal.edu.co/index.php/dyna/article/view/34742
dc.relation.ispartof.spa.fl_str_mv Universidad Nacional de Colombia Revistas electrónicas UN Dyna
Dyna
dc.relation.ispartofseries.none.fl_str_mv Dyna; Vol. 79, núm. 174 (2012); 58-61 DYNA; Vol. 79, núm. 174 (2012); 58-61 2346-2183 0012-7353
dc.relation.references.spa.fl_str_mv Ávila Bernal, Alba Graciela and Bonilla Osorio, Ruy Sebastián (2012) Local anodic oxidation on silicon (100) substrates using atomic force microscopy. Dyna; Vol. 79, núm. 174 (2012); 58-61 DYNA; Vol. 79, núm. 174 (2012); 58-61 2346-2183 0012-7353 .
dc.rights.spa.fl_str_mv Derechos reservados - Universidad Nacional de Colombia
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.license.spa.fl_str_mv Atribución-NoComercial 4.0 Internacional
dc.rights.uri.spa.fl_str_mv http://creativecommons.org/licenses/by-nc/4.0/
dc.rights.accessrights.spa.fl_str_mv info:eu-repo/semantics/openAccess
rights_invalid_str_mv Atribución-NoComercial 4.0 Internacional
Derechos reservados - Universidad Nacional de Colombia
http://creativecommons.org/licenses/by-nc/4.0/
http://purl.org/coar/access_right/c_abf2
eu_rights_str_mv openAccess
dc.format.mimetype.spa.fl_str_mv application/pdf
dc.publisher.spa.fl_str_mv Universidad Nacional de Colombia Sede Medellín
institution Universidad Nacional de Colombia
bitstream.url.fl_str_mv https://repositorio.unal.edu.co/bitstream/unal/44470/1/34742-191288-1-PB.html
https://repositorio.unal.edu.co/bitstream/unal/44470/2/34742-135268-1-PB.pdf
https://repositorio.unal.edu.co/bitstream/unal/44470/3/34742-135268-1-PB.pdf.jpg
bitstream.checksum.fl_str_mv 783363ad1146d439866b8ee566f452c3
232a1c982763a361514e8ad64b052a91
646d14db4da90c185ab0329b70d8846c
bitstream.checksumAlgorithm.fl_str_mv MD5
MD5
MD5
repository.name.fl_str_mv Repositorio Institucional Universidad Nacional de Colombia
repository.mail.fl_str_mv repositorio_nal@unal.edu.co
_version_ 1806886652184887296

Publicaciones similares