Design and characterization of thermally actuated bimetallic membranes by michelson interferometry
This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Mi...
- Autores:
-
Duarte, Julio Enrique
Fernández Morales, Flavio Humberto
Martín Badosa, Estela
- Tipo de recurso:
- Article of journal
- Fecha de publicación:
- 2011
- Institución:
- Universidad Nacional de Colombia
- Repositorio:
- Universidad Nacional de Colombia
- Idioma:
- spa
- OAI Identifier:
- oai:repositorio.unal.edu.co:unal/37740
- Acceso en línea:
- https://repositorio.unal.edu.co/handle/unal/37740
http://bdigital.unal.edu.co/27824/
- Palabra clave:
- Bietallic effect
micromembranes
interferometry
Finite Element Method
- Rights
- openAccess
- License
- Atribución-NoComercial 4.0 Internacional
| id |
UNACIONAL2_0ea9d7007e845e65d2ef632bd6f123cb |
|---|---|
| oai_identifier_str |
oai:repositorio.unal.edu.co:unal/37740 |
| network_acronym_str |
UNACIONAL2 |
| network_name_str |
Universidad Nacional de Colombia |
| repository_id_str |
|
| spelling |
Atribución-NoComercial 4.0 InternacionalDerechos reservados - Universidad Nacional de Colombiahttp://creativecommons.org/licenses/by-nc/4.0/info:eu-repo/semantics/openAccesshttp://purl.org/coar/access_right/c_abf2Duarte, Julio Enriqueee8902db-d480-4648-b8d0-3e2e6b298516300Fernández Morales, Flavio Humbertoc2a83834-d951-44f0-be89-66766bb57a46300Martín Badosa, Estela59ffde19-909f-4340-b003-167b290ff3ac3002019-06-28T01:58:03Z2019-06-28T01:58:03Z2011https://repositorio.unal.edu.co/handle/unal/37740http://bdigital.unal.edu.co/27824/This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations.application/pdfspaUniversidad Nacional de Colombia Sede Medellínhttp://revistas.unal.edu.co/index.php/dyna/article/view/25719Universidad Nacional de Colombia Revistas electrónicas UN DynaDynaDyna; Vol. 78, núm. 166 (2011); 75-80 DYNA; Vol. 78, núm. 166 (2011); 75-80 2346-2183 0012-7353Duarte, Julio Enrique and Fernández Morales, Flavio Humberto and Martín Badosa, Estela (2011) Design and characterization of thermally actuated bimetallic membranes by michelson interferometry. Dyna; Vol. 78, núm. 166 (2011); 75-80 DYNA; Vol. 78, núm. 166 (2011); 75-80 2346-2183 0012-7353 .Design and characterization of thermally actuated bimetallic membranes by michelson interferometryArtículo de revistainfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionhttp://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1http://purl.org/coar/version/c_970fb48d4fbd8a85Texthttp://purl.org/redcol/resource_type/ARTBietallic effectmicromembranesinterferometryFinite Element MethodORIGINAL25719-90208-1-PB.pdfapplication/pdf515434https://repositorio.unal.edu.co/bitstream/unal/37740/1/25719-90208-1-PB.pdff71228cc415fbb04213f395647b81492MD5125719-160933-1-PB.htmltext/html24664https://repositorio.unal.edu.co/bitstream/unal/37740/2/25719-160933-1-PB.htmlb229afa6ecb8deba749c52fd8004ca7eMD52THUMBNAIL25719-90208-1-PB.pdf.jpg25719-90208-1-PB.pdf.jpgGenerated Thumbnailimage/jpeg9843https://repositorio.unal.edu.co/bitstream/unal/37740/3/25719-90208-1-PB.pdf.jpg0c5d7b4a71d98fa3af504159a8741355MD53unal/37740oai:repositorio.unal.edu.co:unal/377402023-01-16 23:04:49.504Repositorio Institucional Universidad Nacional de Colombiarepositorio_nal@unal.edu.co |
| dc.title.spa.fl_str_mv |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| title |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| spellingShingle |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry Bietallic effect micromembranes interferometry Finite Element Method |
| title_short |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| title_full |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| title_fullStr |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| title_full_unstemmed |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| title_sort |
Design and characterization of thermally actuated bimetallic membranes by michelson interferometry |
| dc.creator.fl_str_mv |
Duarte, Julio Enrique Fernández Morales, Flavio Humberto Martín Badosa, Estela |
| dc.contributor.author.spa.fl_str_mv |
Duarte, Julio Enrique Fernández Morales, Flavio Humberto Martín Badosa, Estela |
| dc.subject.proposal.spa.fl_str_mv |
Bietallic effect micromembranes interferometry Finite Element Method |
| topic |
Bietallic effect micromembranes interferometry Finite Element Method |
| description |
This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations. |
| publishDate |
2011 |
| dc.date.issued.spa.fl_str_mv |
2011 |
| dc.date.accessioned.spa.fl_str_mv |
2019-06-28T01:58:03Z |
| dc.date.available.spa.fl_str_mv |
2019-06-28T01:58:03Z |
| dc.type.spa.fl_str_mv |
Artículo de revista |
| dc.type.coar.fl_str_mv |
http://purl.org/coar/resource_type/c_2df8fbb1 |
| dc.type.driver.spa.fl_str_mv |
info:eu-repo/semantics/article |
| dc.type.version.spa.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
| dc.type.coar.spa.fl_str_mv |
http://purl.org/coar/resource_type/c_6501 |
| dc.type.coarversion.spa.fl_str_mv |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| dc.type.content.spa.fl_str_mv |
Text |
| dc.type.redcol.spa.fl_str_mv |
http://purl.org/redcol/resource_type/ART |
| format |
http://purl.org/coar/resource_type/c_6501 |
| status_str |
publishedVersion |
| dc.identifier.uri.none.fl_str_mv |
https://repositorio.unal.edu.co/handle/unal/37740 |
| dc.identifier.eprints.spa.fl_str_mv |
http://bdigital.unal.edu.co/27824/ |
| url |
https://repositorio.unal.edu.co/handle/unal/37740 http://bdigital.unal.edu.co/27824/ |
| dc.language.iso.spa.fl_str_mv |
spa |
| language |
spa |
| dc.relation.spa.fl_str_mv |
http://revistas.unal.edu.co/index.php/dyna/article/view/25719 |
| dc.relation.ispartof.spa.fl_str_mv |
Universidad Nacional de Colombia Revistas electrónicas UN Dyna Dyna |
| dc.relation.ispartofseries.none.fl_str_mv |
Dyna; Vol. 78, núm. 166 (2011); 75-80 DYNA; Vol. 78, núm. 166 (2011); 75-80 2346-2183 0012-7353 |
| dc.relation.references.spa.fl_str_mv |
Duarte, Julio Enrique and Fernández Morales, Flavio Humberto and Martín Badosa, Estela (2011) Design and characterization of thermally actuated bimetallic membranes by michelson interferometry. Dyna; Vol. 78, núm. 166 (2011); 75-80 DYNA; Vol. 78, núm. 166 (2011); 75-80 2346-2183 0012-7353 . |
| dc.rights.spa.fl_str_mv |
Derechos reservados - Universidad Nacional de Colombia |
| dc.rights.coar.fl_str_mv |
http://purl.org/coar/access_right/c_abf2 |
| dc.rights.license.spa.fl_str_mv |
Atribución-NoComercial 4.0 Internacional |
| dc.rights.uri.spa.fl_str_mv |
http://creativecommons.org/licenses/by-nc/4.0/ |
| dc.rights.accessrights.spa.fl_str_mv |
info:eu-repo/semantics/openAccess |
| rights_invalid_str_mv |
Atribución-NoComercial 4.0 Internacional Derechos reservados - Universidad Nacional de Colombia http://creativecommons.org/licenses/by-nc/4.0/ http://purl.org/coar/access_right/c_abf2 |
| eu_rights_str_mv |
openAccess |
| dc.format.mimetype.spa.fl_str_mv |
application/pdf |
| dc.publisher.spa.fl_str_mv |
Universidad Nacional de Colombia Sede Medellín |
| institution |
Universidad Nacional de Colombia |
| bitstream.url.fl_str_mv |
https://repositorio.unal.edu.co/bitstream/unal/37740/1/25719-90208-1-PB.pdf https://repositorio.unal.edu.co/bitstream/unal/37740/2/25719-160933-1-PB.html https://repositorio.unal.edu.co/bitstream/unal/37740/3/25719-90208-1-PB.pdf.jpg |
| bitstream.checksum.fl_str_mv |
f71228cc415fbb04213f395647b81492 b229afa6ecb8deba749c52fd8004ca7e 0c5d7b4a71d98fa3af504159a8741355 |
| bitstream.checksumAlgorithm.fl_str_mv |
MD5 MD5 MD5 |
| repository.name.fl_str_mv |
Repositorio Institucional Universidad Nacional de Colombia |
| repository.mail.fl_str_mv |
repositorio_nal@unal.edu.co |
| _version_ |
1814089431921983488 |