Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering

4d and 5d series of the transition metals are used to the obtaining nitrides metallic, due to the synthesis of PtN, AgN and AuN in the last years. Different nitrides are obtained in the Plasma Assisted Physics Vapour Deposition system, due to its ionization energy which is necessary for their format...

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2016
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Universidad de Medellín
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Repositorio UDEM
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eng
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oai:repository.udem.edu.co:11407/2482
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http://hdl.handle.net/11407/2482
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spelling 2016-07-27T21:52:39Z2016-07-27T21:52:39Z201617426588http://hdl.handle.net/11407/248210.1088/1742-6596/687/1/0120064d and 5d series of the transition metals are used to the obtaining nitrides metallic, due to the synthesis of PtN, AgN and AuN in the last years. Different nitrides are obtained in the Plasma Assisted Physics Vapour Deposition system, due to its ionization energy which is necessary for their formation. In this paper a Magnetron Sputtering system was used to obtain Au thin films on Si wafers in Nitrogen atmosphere. The substrate temperature was varied between 500 to 950°C. The samples obtained at high temperatures (>500°C) show Au, Si and N elements, as it is corroborated in the narrow spectrum obtained for X-Ray Photoelectron Spectroscopy; besides the competition of orientation crystallographic texture between (111) and (311) directions was present in the X-Ray Diffraction analysis to the sample heated at 950°C.engInstitute of Physics Publishinghttp://iopscience.iop.org/article/10.1088/1742-6596/687/1/012006/metaJournal of Physics: Conference Series 687 (2016) 012006ScopusObtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputteringConference Paperinfo:eu-repo/semantics/conferenceObjecthttp://purl.org/coar/resource_type/c_c94finfo:eu-repo/semantics/restrictedAccesshttp://purl.org/coar/access_right/c_16ecQuintero, J.H., Universidad de Medellín, Medellín, ColombiaOspina, R., Centro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, BrazilMello, A., Centro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, BrazilQuintero J.H.Ospina R.Mello A.Universidad de Medellín, Medellín, ColombiaCentro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, Brazil4d and 5d series of the transition metals are used to the obtaining nitrides metallic, due to the synthesis of PtN, AgN and AuN in the last years. Different nitrides are obtained in the Plasma Assisted Physics Vapour Deposition system, due to its ionization energy which is necessary for their formation. In this paper a Magnetron Sputtering system was used to obtain Au thin films on Si wafers in Nitrogen atmosphere. The substrate temperature was varied between 500 to 950°C. The samples obtained at high temperatures (>500°C) show Au, Si and N elements, as it is corroborated in the narrow spectrum obtained for X-Ray Photoelectron Spectroscopy; besides the competition of orientation crystallographic texture between (111) and (311) directions was present in the X-Ray Diffraction analysis to the sample heated at 950°C.THUMBNAIL12. Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering.pdf.jpg12. Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering.pdf.jpgIM Thumbnailimage/jpeg5063http://repository.udem.edu.co/bitstream/11407/2482/2/12.%20Obtaining%20Au%20thin%20films%20in%20atmosphere%20of%20reactive%20nitrogen%20through%20magnetron%20sputtering.pdf.jpg4788fe17e4901eff0c60409e40f01cd5MD52ORIGINAL12. Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering.pdf12. Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering.pdfapplication/pdf1051800http://repository.udem.edu.co/bitstream/11407/2482/1/12.%20Obtaining%20Au%20thin%20films%20in%20atmosphere%20of%20reactive%20nitrogen%20through%20magnetron%20sputtering.pdf88d72413307d994a6bfb2625313ca9e3MD5111407/2482oai:repository.udem.edu.co:11407/24822020-05-27 15:41:34.6Repositorio Institucional Universidad de Medellinrepositorio@udem.edu.co
dc.title.spa.fl_str_mv Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
spellingShingle Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title_short Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title_full Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title_fullStr Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title_full_unstemmed Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
title_sort Obtaining Au thin films in atmosphere of reactive nitrogen through magnetron sputtering
dc.contributor.affiliation.spa.fl_str_mv Quintero, J.H., Universidad de Medellín, Medellín, Colombia
Ospina, R., Centro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, Brazil
Mello, A., Centro Brasileiro de Pesquisas Físicas (CBPF), Rio de Janeiro, Brazil
description 4d and 5d series of the transition metals are used to the obtaining nitrides metallic, due to the synthesis of PtN, AgN and AuN in the last years. Different nitrides are obtained in the Plasma Assisted Physics Vapour Deposition system, due to its ionization energy which is necessary for their formation. In this paper a Magnetron Sputtering system was used to obtain Au thin films on Si wafers in Nitrogen atmosphere. The substrate temperature was varied between 500 to 950°C. The samples obtained at high temperatures (>500°C) show Au, Si and N elements, as it is corroborated in the narrow spectrum obtained for X-Ray Photoelectron Spectroscopy; besides the competition of orientation crystallographic texture between (111) and (311) directions was present in the X-Ray Diffraction analysis to the sample heated at 950°C.
publishDate 2016
dc.date.accessioned.none.fl_str_mv 2016-07-27T21:52:39Z
dc.date.available.none.fl_str_mv 2016-07-27T21:52:39Z
dc.date.created.none.fl_str_mv 2016
dc.type.eng.fl_str_mv Conference Paper
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dc.identifier.issn.none.fl_str_mv 17426588
dc.identifier.uri.none.fl_str_mv http://hdl.handle.net/11407/2482
dc.identifier.doi.none.fl_str_mv 10.1088/1742-6596/687/1/012006
identifier_str_mv 17426588
10.1088/1742-6596/687/1/012006
url http://hdl.handle.net/11407/2482
dc.language.iso.none.fl_str_mv eng
language eng
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dc.relation.ispartofen.eng.fl_str_mv Journal of Physics: Conference Series 687 (2016) 012006
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dc.publisher.spa.fl_str_mv Institute of Physics Publishing
dc.source.spa.fl_str_mv Scopus
institution Universidad de Medellín
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