Macroporous silicon: efficient antireflective layer on crystalline silicon

A macroporous silicon layer (ma-PS) electrochemically grown on crystalline silicon surface can be used as an efficient antireflective layer in optical devices as antireflection coating. In this work, we presented the ma-PS layers fabricated on crystalline silicon (c-Si) n-type and p +-type, obtained...

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Autores:
Fonthal Rico, Faruk
Torres Chávez, Ivaldo
Rodríguez, Ángel
Tipo de recurso:
Article of journal
Fecha de publicación:
2011
Institución:
Universidad Autónoma de Occidente
Repositorio:
RED: Repositorio Educativo Digital UAO
Idioma:
eng
OAI Identifier:
oai:red.uao.edu.co:10614/11902
Acceso en línea:
http://red.uao.edu.co//handle/10614/11902
https://www.researchgate.net/publication/242206332_Macroporous_silicon_Efficient_antireflective_layer_on_crystalline_silicon
Palabra clave:
Porous silicon
Crystalline silicon
Electrochemical etching
Antireflective coating
Etching time
Rights
openAccess
License
Derechos Reservados - Universidad Autónoma de Occidente
Description
Summary:A macroporous silicon layer (ma-PS) electrochemically grown on crystalline silicon surface can be used as an efficient antireflective layer in optical devices as antireflection coating. In this work, we presented the ma-PS layers fabricated on crystalline silicon (c-Si) n-type and p +-type, obtained by electrochemical etching. The morphology, porosity, thickness of ma-PS layer can be adjusted by controlling the electrochemical formation conditions. The optical behaviour of the antireflective coating over the solar spectrum is determined, resulting in very low values of the normalized reflectivity coefficient (below ~1%). The reflectivity measurements were evaluated at 45° in the different samples of the ma-PS/c-Si