Identification by force modulation microscopy of nanoparticles generated in vacuum arcs

This paper presents an alternative method based on force modulation microscopy (FMM), for the identification of nanogrobes produced in the plasma generated by the cathode spots of the arcs in a vacuum. The FMM technique is enabled for the detection of variations in the mechanical properties of a sur...

Full description

Autores:
Arroyave Franco, Mauricio
Tipo de recurso:
Fecha de publicación:
2006
Institución:
Universidad EAFIT
Repositorio:
Repositorio EAFIT
Idioma:
eng
OAI Identifier:
oai:repository.eafit.edu.co:10784/14563
Acceso en línea:
http://hdl.handle.net/10784/14563
Palabra clave:
Force Modulation
Atomic Force
Nanogotas
Tin
Ti
Modulación De Fuerza
Fuerza Atómica
Nanogotas
Tin
Ti
Rights
License
Copyright (c) 2006 Mauricio Arroyave Franco
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spelling Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees2006-06-012019-11-22T19:18:50Z2006-06-012019-11-22T19:18:50Z2256-43141794-9165http://hdl.handle.net/10784/14563This paper presents an alternative method based on force modulation microscopy (FMM), for the identification of nanogrobes produced in the plasma generated by the cathode spots of the arcs in a vacuum. The FMM technique is enabled for the detection of variations in the mechanical properties of a surface, with high sensitivity. Titanium nitride (TiN) coatings deposited on Silicon oriented by the pulsed arc process have been analyzed. Atomic force microscopy (AFM) and FMM microscopy images have been obtained simultaneously by means of which the presence of nanogotas has been identified. Additionally, X-ray diffraction spectra (XRD) have been taken from the coated samples. The existence of contaminating particles of 47 nanometers in diameter on the coatings has been reported.En este trabajo se presenta un método alternativo basado en microscopia de modulación de fuerza (FMM), para la identificación de nanogotas producidas en el plasma generado por los spots catódicos de los arcos en vacío. La técnica FMM esta habilitada para la detección de variaciones en las propiedades mecánicas de una superficie, con alta sensibilidad. Se han analizado recubrimientos de nitruro de titanio (TiN) depositados sobre Silicio orientado por el proceso de arco en vacío pulsado. Se han obtenido simultáneamente imágenes de microscopia de fuerza atómica (AFM) y de microscopia FMM mediante las cuales se ha podido identificar la presencia de nanogotas. Adicionalmente se han tomado espectros de difracción de rayos X (XRD) de las muestras recubiertas. Se ha reportado la existencia de partículas contaminantes de 47 nanómetros de diámetro sobre los recubrimientos.application/pdfengUniversidad EAFIThttp://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/486http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/486Copyright (c) 2006 Mauricio Arroyave FrancoAcceso abiertohttp://purl.org/coar/access_right/c_abf2instname:Universidad EAFITreponame:Repositorio Institucional Universidad EAFITIngeniería y Ciencia; Vol 2, No 3 (2006)Identification by force modulation microscopy of nanoparticles generated in vacuum arcsIdentificación por microscopía de modulación de fuerza de nanopartículas generadas en arcos de vacío.articleinfo:eu-repo/semantics/articlepublishedVersioninfo:eu-repo/semantics/publishedVersionArtículohttp://purl.org/coar/version/c_970fb48d4fbd8a85http://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1Force ModulationAtomic ForceNanogotasTinTiModulación De FuerzaFuerza AtómicaNanogotasTinTiArroyave Franco, MauricioUniversidad EAFITIngeniería y Ciencia236571ing.cienc.ORIGINALdocument (2).pdfdocument (2).pdfTexto completo PDFapplication/pdf114969https://repository.eafit.edu.co/bitstreams/1b922f8f-d358-406f-b183-6cb491af8184/download75a02f1d3ee9d111fda5206f579f67bfMD51THUMBNAILminaitura-ig_Mesa de trabajo 1.jpgminaitura-ig_Mesa de trabajo 1.jpgimage/jpeg265796https://repository.eafit.edu.co/bitstreams/40f47450-4adc-4477-ae66-b77352016da9/downloadda9b21a5c7e00c7f1127cef8e97035e0MD5210784/14563oai:repository.eafit.edu.co:10784/145632020-01-30 08:12:00.705open.accesshttps://repository.eafit.edu.coRepositorio Institucional Universidad EAFITrepositorio@eafit.edu.co
dc.title.eng.fl_str_mv Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
dc.title.spa.fl_str_mv Identificación por microscopía de modulación de fuerza de nanopartículas generadas en arcos de vacío.
title Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
spellingShingle Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
Force Modulation
Atomic Force
Nanogotas
Tin
Ti
Modulación De Fuerza
Fuerza Atómica
Nanogotas
Tin
Ti
title_short Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
title_full Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
title_fullStr Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
title_full_unstemmed Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
title_sort Identification by force modulation microscopy of nanoparticles generated in vacuum arcs
dc.creator.fl_str_mv Arroyave Franco, Mauricio
dc.contributor.author.spa.fl_str_mv Arroyave Franco, Mauricio
dc.contributor.affiliation.spa.fl_str_mv Universidad EAFIT
dc.subject.keyword.eng.fl_str_mv Force Modulation
Atomic Force
Nanogotas
Tin
Ti
topic Force Modulation
Atomic Force
Nanogotas
Tin
Ti
Modulación De Fuerza
Fuerza Atómica
Nanogotas
Tin
Ti
dc.subject.keyword.spa.fl_str_mv Modulación De Fuerza
Fuerza Atómica
Nanogotas
Tin
Ti
description This paper presents an alternative method based on force modulation microscopy (FMM), for the identification of nanogrobes produced in the plasma generated by the cathode spots of the arcs in a vacuum. The FMM technique is enabled for the detection of variations in the mechanical properties of a surface, with high sensitivity. Titanium nitride (TiN) coatings deposited on Silicon oriented by the pulsed arc process have been analyzed. Atomic force microscopy (AFM) and FMM microscopy images have been obtained simultaneously by means of which the presence of nanogotas has been identified. Additionally, X-ray diffraction spectra (XRD) have been taken from the coated samples. The existence of contaminating particles of 47 nanometers in diameter on the coatings has been reported.
publishDate 2006
dc.date.issued.none.fl_str_mv 2006-06-01
dc.date.available.none.fl_str_mv 2019-11-22T19:18:50Z
dc.date.accessioned.none.fl_str_mv 2019-11-22T19:18:50Z
dc.date.none.fl_str_mv 2006-06-01
dc.type.eng.fl_str_mv article
info:eu-repo/semantics/article
publishedVersion
info:eu-repo/semantics/publishedVersion
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http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.local.spa.fl_str_mv Artículo
status_str publishedVersion
dc.identifier.issn.none.fl_str_mv 2256-4314
1794-9165
dc.identifier.uri.none.fl_str_mv http://hdl.handle.net/10784/14563
identifier_str_mv 2256-4314
1794-9165
url http://hdl.handle.net/10784/14563
dc.language.iso.eng.fl_str_mv eng
language eng
dc.relation.isversionof.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/486
dc.relation.uri.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/486
dc.rights.eng.fl_str_mv Copyright (c) 2006 Mauricio Arroyave Franco
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.local.spa.fl_str_mv Acceso abierto
rights_invalid_str_mv Copyright (c) 2006 Mauricio Arroyave Franco
Acceso abierto
http://purl.org/coar/access_right/c_abf2
dc.format.none.fl_str_mv application/pdf
dc.coverage.spatial.eng.fl_str_mv Medellín de: Lat: 06 15 00 N degrees minutes Lat: 6.2500 decimal degrees Long: 075 36 00 W degrees minutes Long: -75.6000 decimal degrees
dc.publisher.spa.fl_str_mv Universidad EAFIT
dc.source.none.fl_str_mv instname:Universidad EAFIT
reponame:Repositorio Institucional Universidad EAFIT
dc.source.spa.fl_str_mv Ingeniería y Ciencia; Vol 2, No 3 (2006)
instname_str Universidad EAFIT
institution Universidad EAFIT
reponame_str Repositorio Institucional Universidad EAFIT
collection Repositorio Institucional Universidad EAFIT
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