Methods employed in optical emission spectroscopy analysis: a review

In this work, different methods employed for the analysis of emission spectra are presented -- The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films -- Some of these techniq...

Full description

Autores:
Devia, D. M.
Rodriguez-Restrepo, L. V.
Restrepo-Parra, E.
Tipo de recurso:
Fecha de publicación:
2014
Institución:
Universidad EAFIT
Repositorio:
Repositorio EAFIT
Idioma:
eng
OAI Identifier:
oai:repository.eafit.edu.co:10784/5300
Acceso en línea:
http://hdl.handle.net/10784/5300
Palabra clave:
ESPECTROSCOPIA DE EMISIÓN
ANÁLISIS ESPECTRAL
ESPECTROSCOPIA DE PLASMA
ANÁLISIS ESPECTRAL
PELÍCULAS DELGADAS
Emission spectroscopy
Spectrum analysis
Plasma spectroscopy
Spectrum analysis
Thin films
Rights
License
Copyright (c) 2015 Ingeniería y Ciencia – ing.cienc.
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spelling 2014-12-192015-05-06T15:16:01Z2014-12-192015-05-06T15:16:01Z1794–9165http://hdl.handle.net/10784/530010.17230/ingciencia.11.21.122256-4314In this work, different methods employed for the analysis of emission spectra are presented -- The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films -- Some of these techniques include magnetron sputtering and arc discharges -- Initially, some fundamental physical principles that support the Optical Emission Spectroscopy (OES) technique are described; then, some rules to consider during the spectral analysis to avoid ambiguities are listed -- Finally, some of the more frequently used spectroscopic methods for determining the physical properties of plasma are describedapplication/pdfengUniversidad EAFITIngeniería y Ciencia - ing.cienc.; Vol. 11, Núm. 21 (2015): 10 años; 239-267http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2459http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2459Copyright (c) 2015 Ingeniería y Ciencia – ing.cienc.http://creativecommons.org/licenses/by/4.0Acceso abiertohttp://purl.org/coar/access_right/c_abf2Ingeniería y Ciencia - ing.cienc.; Vol. 11, Núm. 21 (2015): 10 años; 239-267instname:Universidad EAFITreponame:Repositorio Institucional Universidad EAFITMethods employed in optical emission spectroscopy analysis: a reviewarticleinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/articleArtículohttp://purl.org/coar/version/c_970fb48d4fbd8a85http://purl.org/coar/resource_type/c_6501http://purl.org/coar/resource_type/c_2df8fbb1ESPECTROSCOPIA DE EMISIÓNANÁLISIS ESPECTRALESPECTROSCOPIA DE PLASMAANÁLISIS ESPECTRALPELÍCULAS DELGADASEmission spectroscopySpectrum analysisPlasma spectroscopySpectrum analysisThin filmsDevia, D. M.Rodriguez-Restrepo, L. V.Restrepo-Parra, E.Universidad Nacional de ColombiaIngeniería y Ciencia1121239267ing.cienc.ORIGINAL12.pdf12.pdfTexto completo PDFapplication/pdf966607https://repository.eafit.edu.co/bitstreams/e3109c52-c261-4e8b-b26e-43c4603fcda4/downloadbd04f60e1d4b981213cff20f262ee868MD51articulo.htmlarticulo.htmlTexto completo HTMLtext/html374https://repository.eafit.edu.co/bitstreams/1a846047-60e1-4fec-903a-4bad32b55f03/downloade8d484ac91af0142bf58c1f9435a2e10MD53THUMBNAILminaitura-ig_Mesa de trabajo 1.jpgminaitura-ig_Mesa de trabajo 1.jpgimage/jpeg265796https://repository.eafit.edu.co/bitstreams/8fec0ce2-a4ea-4adf-83c0-ad4e9477471e/downloadda9b21a5c7e00c7f1127cef8e97035e0MD5210784/5300oai:repository.eafit.edu.co:10784/53002020-03-01 23:20:20.677open.accesshttps://repository.eafit.edu.coRepositorio Institucional Universidad EAFITrepositorio@eafit.edu.co
dc.title.eng.fl_str_mv Methods employed in optical emission spectroscopy analysis: a review
title Methods employed in optical emission spectroscopy analysis: a review
spellingShingle Methods employed in optical emission spectroscopy analysis: a review
ESPECTROSCOPIA DE EMISIÓN
ANÁLISIS ESPECTRAL
ESPECTROSCOPIA DE PLASMA
ANÁLISIS ESPECTRAL
PELÍCULAS DELGADAS
Emission spectroscopy
Spectrum analysis
Plasma spectroscopy
Spectrum analysis
Thin films
title_short Methods employed in optical emission spectroscopy analysis: a review
title_full Methods employed in optical emission spectroscopy analysis: a review
title_fullStr Methods employed in optical emission spectroscopy analysis: a review
title_full_unstemmed Methods employed in optical emission spectroscopy analysis: a review
title_sort Methods employed in optical emission spectroscopy analysis: a review
dc.creator.fl_str_mv Devia, D. M.
Rodriguez-Restrepo, L. V.
Restrepo-Parra, E.
dc.contributor.author.spa.fl_str_mv Devia, D. M.
Rodriguez-Restrepo, L. V.
Restrepo-Parra, E.
dc.contributor.affiliation.spa.fl_str_mv Universidad Nacional de Colombia
dc.subject.lemb.none.fl_str_mv ESPECTROSCOPIA DE EMISIÓN
ANÁLISIS ESPECTRAL
ESPECTROSCOPIA DE PLASMA
ANÁLISIS ESPECTRAL
PELÍCULAS DELGADAS
topic ESPECTROSCOPIA DE EMISIÓN
ANÁLISIS ESPECTRAL
ESPECTROSCOPIA DE PLASMA
ANÁLISIS ESPECTRAL
PELÍCULAS DELGADAS
Emission spectroscopy
Spectrum analysis
Plasma spectroscopy
Spectrum analysis
Thin films
dc.subject.keyword.none.fl_str_mv Emission spectroscopy
Spectrum analysis
Plasma spectroscopy
Spectrum analysis
Thin films
description In this work, different methods employed for the analysis of emission spectra are presented -- The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films -- Some of these techniques include magnetron sputtering and arc discharges -- Initially, some fundamental physical principles that support the Optical Emission Spectroscopy (OES) technique are described; then, some rules to consider during the spectral analysis to avoid ambiguities are listed -- Finally, some of the more frequently used spectroscopic methods for determining the physical properties of plasma are described
publishDate 2014
dc.date.issued.none.fl_str_mv 2014-12-19
dc.date.available.none.fl_str_mv 2015-05-06T15:16:01Z
dc.date.accessioned.none.fl_str_mv 2015-05-06T15:16:01Z
dc.date.none.fl_str_mv 2014-12-19
dc.type.eng.fl_str_mv article
dc.type.none.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/article
dc.type.coarversion.fl_str_mv http://purl.org/coar/version/c_970fb48d4fbd8a85
dc.type.coar.fl_str_mv http://purl.org/coar/resource_type/c_6501
http://purl.org/coar/resource_type/c_2df8fbb1
dc.type.local.spa.fl_str_mv Artículo
dc.identifier.issn.none.fl_str_mv 1794–9165
dc.identifier.uri.none.fl_str_mv http://hdl.handle.net/10784/5300
dc.identifier.doi.none.fl_str_mv 10.17230/ingciencia.11.21.12
dc.identifier.eissn.none.fl_str_mv 2256-4314
identifier_str_mv 1794–9165
10.17230/ingciencia.11.21.12
2256-4314
url http://hdl.handle.net/10784/5300
dc.language.iso.eng.fl_str_mv eng
language eng
dc.relation.ispartof.spa.fl_str_mv Ingeniería y Ciencia - ing.cienc.; Vol. 11, Núm. 21 (2015): 10 años; 239-267
dc.relation.isversionof.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2459
dc.relation.uri.none.fl_str_mv http://publicaciones.eafit.edu.co/index.php/ingciencia/article/view/2459
dc.rights.spa.fl_str_mv Copyright (c) 2015 Ingeniería y Ciencia – ing.cienc.
http://creativecommons.org/licenses/by/4.0
dc.rights.coar.fl_str_mv http://purl.org/coar/access_right/c_abf2
dc.rights.local.spa.fl_str_mv Acceso abierto
rights_invalid_str_mv Copyright (c) 2015 Ingeniería y Ciencia – ing.cienc.
http://creativecommons.org/licenses/by/4.0
Acceso abierto
http://purl.org/coar/access_right/c_abf2
dc.format.none.fl_str_mv application/pdf
dc.publisher.spa.fl_str_mv Universidad EAFIT
dc.source.spa.fl_str_mv Ingeniería y Ciencia - ing.cienc.; Vol. 11, Núm. 21 (2015): 10 años; 239-267
instname:Universidad EAFIT
reponame:Repositorio Institucional Universidad EAFIT
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institution Universidad EAFIT
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